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Instrument Transfer Function (ITF) Characterization and Reconstruction

Reliable Calibration

Accurate knowledge of the Instrument Transfer Function (ITF) is essential for precise topographical measurements using White-Light Interferometry (WLI). To ensure measurement accuracy, our Binary Pseudo Random Array (BPRA) test artifacts are specially engineered for fast, accurate, and repeatable calibration.

BPRA: In-Situ, Full-Field-of-View & Full-Bandwidth Calibration

  • Pseudo-random, binary patterns with white-noise power spectral density (PSD)
  • 1D/2D calibration targets on ultra-polished wafers
  • MTF/ITF extraction to analyze complete system response
  • Paired software reconstructs true topography and enhances image fidelity

Our BPRA calibration solutions are designed and fabricated based on metrology tool specifications, ensuring optimal accuracy and efficiency.

Product Specification

Products and Solutions

  • Binary Pseudo Random Array Test Standards are available with minimum feature sizes between 1.5 nm ~ 15 µm.
  • Custom fabrication of BPRA test standards are possible to meet the application requirement
BPRA customer
    BPRA customer

    “BPRA is an almost magic simulation of white noise that helps us to see whether we can correctly assess the fine details; for instance, for an interferometer with 100 mm aperture we can easily verify that its resolution is 10 lines / mm or better, or perhaps less than 0.5 lines / mm, a task that is very difficult to achieve without BPRA.”

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    HighRI Optics, Inc. is a spin-off company of aBeam Technologies, Inc. headquartered in Oakland, CA.
    We develop advanced optical materials and applications. Our proprietary and patented high refractive index optical materials enable advanced optics applications. Fiber nanoimprint technology dramatically simplifies light manipulation at the nanometer scale.

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